The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 1998
Filed:
Jan. 16, 1996
Applicant:
Inventors:
James J Baecker, Minneapolis, MN (US);
D Scott Becker, Excelsior, MN (US);
Michael J Foline, Carver, MN (US);
Todd K Maciej, Carver, MN (US);
Assignee:
FSI Interntional, Chaska, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134 21 ; 134 23 ; 134 30 ; 134 54 ; 156345 ; 156625 ; 156646 ; 156657 ; 20419237 ; 20429825 ; 20429833 ; 414217 ; 437225 ;
Abstract
A process module which can be integrated with a reduced pressure cluster tool system for semiconductor wafer processing to perform ambient or near ambient pressure reactions without requiring an intermediate buffer chamber. The process module includes: