The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 1998

Filed:

Nov. 22, 1995
Applicant:
Inventors:

Hiroyuki Hama, Meiwa-mura, JP;

Kazunari Suga, Gyoda, JP;

Assignee:

Advantest Corp., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
3241581 ; 414590 ;
Abstract

A semiconductor test system having a test head connection apparatus for connecting and disconnecting a test head of the test system with a wafer prober or a test handler includes a housing formed outside of the semiconductor test system wherein the housing is integral with a body of the test system, a pair of arms provide on the housing for holding the test head wherein the test head rotates about 180 degrees in the arms so that a performance board on the test head faces with a corresponding member on the wafer prober or the test handler, at least one rail built on a floor in a direction which accurately positioning the test head right over the wafer prober or the test handler, a guide mechanism provided on the housing to guide an up-down movement of the arms, a plurality of free casters provided at the bottom of the housing to transfer the test system and the test head toward the wafer prober or the test handler along the rail, and a balancing mechanism for offsetting the weight of the test head so that the up-down movement of the arms holding the test head is controlled with substantially less power.


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