The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 1998
Filed:
Feb. 27, 1996
Yoichi Kanemitsu, Fukuoka-ken, JP;
Katsuhide Watanabe, Kanagawa-ken, JP;
Ebara Corporation, Tokyo, JP;
Abstract
An electron microscope has an electron gun for emitting an electron beam, a specimen holder for holding a specimen thereon, and a deflection coil for applying the electron beam from the electron gun to the specimen on the specimen holder. A controller produces a differential signal representing the difference between a signal from a vibration sensor which detects vibrations of the electron gun and a signal from another vibration sensor which detects vibrations of the specimen holder. The differential signal is added to a deflection signal for the deflection coil for thereby effecting feedforward control of the electron beam to cause the electron beam to reach the specimen on the specimen holder, irrespective of the vibrations of the electron gun and the specimen holder.