The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1998
Filed:
Mar. 17, 1997
Blaine D Johs, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
Steven E Green, Lincoln, NE (US);
Shakil A Pittal, Lincoln, NE (US);
John A Woollam, Lincoln, NE (US);
J.A. Woollam Co. Inc., Lincoln, NE (US);
Abstract
Disclosed is a dispersive optics system, in the context of sample substrate system investigating spectroscopic reflectometer and the like systems, which, in use, produce a plurality of 'Orders' of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one 'Order' of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light, over a larger range, than would be possible were only one 'Order' of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders. Also disclosed is a quadrant detector means of dispersive optics alignment, and a compensator means for reducing the effect of detector element polarization state dependence.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile