The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1998
Filed:
Apr. 05, 1996
Applicant:
Inventor:
Paul D Lucas, Melrose, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
73202 ;
Abstract
A multi-channel mass flow transducer has a single laminar flow element in a primary fluid flow path and multiple secondary flow paths in parallel with and in fluid communication with the primary flow path. Flow restriction elements are disposed in one or more of the secondary flow paths to establish different flow rate measurement 'channels' having particular flow rate ranges. The multi-channel transducer of the present invention is capable of measuring fluid flow rates over an extended range and eliminates the need for multiple transducers to measure varying fluid flows.