The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1998
Filed:
Feb. 06, 1997
Taijiro Uchida, Chigasaki, JP;
Nihon Shinku Gijutsu Kabushiki Kaisha, Chigasaki, JP;
Abstract
An apparatus for generating magnetically neutral line discharge type plasma comprises a magnetic field generating coil for forming magnetically neutral lines defined by continuously connecting points of zero-intensity magnetic field that is arranged within the vacuum chamber so that a couple of lines of magnetic force crossing vertically at the magnetically neutral lines in the perpendicular plane where the center axis is located can be connected by surrounding the magnetic field generating coil without intersecting or touching the lateral wall of the vacuum chamber to reduce any possible loss of plasma and any possible damage to the lateral wall. As the neutral line discharge type plasma has a capability to generate a well thermalized Maxwellian distribution plasma, an apparatus for generating the magnetically neutral line discharge type plasma is arranged to be utilized to diminish damage of of the lateral wall of the vacuum vessel and to control the electric potential of the plasma to be generated for ion extraction use.