The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 1998
Filed:
Aug. 18, 1997
Hiroto Koizumi, Yamanashi, JP;
Hidehito Yokomori, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A monitor device for monitoring an object to be tested is provided in a test apparatus which includes a test section for testing the electrical characteristics of the object, a storage section for storing the object, and a transfer section for conveying the object between the storage section and the test section. This monitor device includes an imaging device used in alignment of the object in the test section, a sensor for sensing the position of the object in the transfer section, and a display panel for displaying an image of the interior of the test apparatus and displaying the alignment state in the test section and the position information of the object in the transfer section in the image of the test apparatus.