The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 1998
Filed:
Jun. 25, 1997
Applicant:
Inventors:
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ; G01B / ;
U.S. Cl.
CPC ...
356 72 ; 356371 ; 356381 ; 25055927 ;
Abstract
Disclosed is a thin-film formation device which has a light irradiating optical system 13 for irradiating a light of predetermined intensity to the substrate 21 which is subject to film formation, a light detecting optical system 14 for detecting the intensity of the reflected light from the surface of the substrate 21, and a thin-film formation controller 15 which stops the film formation by controlling a material introducing system 11 when the intensity of reflected light takes a maximum value. The device is so arranged that the film formation operation can be stopped when the intensity of reflected light takes a maximum value thereby providing a smoothest thin film.