The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 1998
Filed:
Dec. 06, 1996
Applicant:
Inventors:
Hiroaki Sugimoto, Kyoto, JP;
Masaru Kitagawa, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ; B01D / ;
U.S. Cl.
CPC ...
95 46 ; 95250 ; 96-6 ; 96201 ;
Abstract
The present invention provides a degassing apparatus having a temperature regulating function. The degassing apparatus includes a number of gas permeating tubes for enabling a processing solution to flow through one of the two flow paths partitioned by gas permeating membranes that allow permeation of a gas but prevent permeation of a liquid, while enabling warm water to flow through the other flow path. A temperature regulator regulates the temperature of the warm water fed to the gas permeating tubes, and a gas suction pump sucks the gas from the warm water.