The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 1998
Filed:
Oct. 11, 1996
Shinichi Ohori, Niigata-ken, JP;
Shin-Etsu Polymer Co., Ltd., Tokyo, JP;
Shin-Etsu Handotai Co., Ltd., Tokyo, JP;
Abstract
A wafer cassette of a wafer carrier holds a plurality of wafer materials such as semiconductor single crystal silicon wafers. The wafer cassette is contained in a box body having a covering for transportation and storage of the silicon wafers with safety from contamination and mechanical damage. The wafer cassette is a casing have an opening in the upper and lower surfaces and having a pair of opposite side walls each of which is provided on the inner surface thereof with a plurality of alignment grooves for receiving wafer materials in parallel with each other. The wafer cassette is provided with wafer presser plates each covering the upper or lower surface in a freely demountable fashion each of which having a pair of engageable parts on two opposite sides thereof. A plurality of elastic plates are provided at the center of the plates, between the pair of the engageable parts, in alignment in the direction of the wafer materials held on the cassette. A protrusion extends from each of the elastic plates and the surface of the protrusions are engraved to form a groove having a V-shaped cross section to receive a wafer material.