The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 1998
Filed:
Oct. 04, 1996
Applicant:
Inventors:
Hideaki Yamamoto, Tokorozawa, JP;
Haruo Matsumaru, Tokyo, JP;
Tetsuaki Suzuki, Mobara, JP;
Mitsuo Nakatani, Mobara, JP;
Michio Tsukii, Mobara, JP;
Akira Sasano, Tokyo, JP;
Saburo Oikawa, Hitachi, JP;
Ryoji Oritsuki, Chiba-ken, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02F / ; G02F / ;
U.S. Cl.
CPC ...
349 46 ; 349 43 ; 349139 ;
Abstract
An anodized oxide film of Al is formed on a scanning signal line and a gate electrode. Al--Ta is used as material of each of the scanning signal line and gate electrode. The thickness of the anodized oxide film is set to 1,000 angstroms or more. The fabrication yield and reliability can be improved.