The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 1998
Filed:
May. 28, 1996
Applicant:
Inventors:
Ruth Ann Hendrickson, Lincoln, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
Richard S Muka, Topsfield, MA (US);
Assignee:
Brooks Automation Inc., Chelmsford, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F25B / ;
U.S. Cl.
CPC ...
165 801 ; 165 802 ; 165 804 ; 165 805 ; 156345 ; 118725 ;
Abstract
Gas-loaded thermal conditioning is used to cause the temperature of a substrate to approach that of a high thermal inertia temperature-controlled plate by adjustable pressure of gas above the substrate, so as to press the substrate against the plate. There is no mechanical contact with the substrate except the plate which it rests on, and there is no danger of overheating or overcooling.