The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 1998
Filed:
May. 29, 1996
H Eric Fischer, Monsey, NY (US);
ATMI Ecosys Corporation, San Jose, CA (US);
Abstract
Scavengers for removing acidic or corrosive gaseous components from semiconductor process effluents comprising a metallic macromer comprising a coordinated complex of (i) metal coordination atoms linked to (ii) oxomeric moieties selected from the group consisting of carbonate, sulfite, carboxylate, and silicate, and methods for synthesizing these scavengers. A method for cleaning an exhaust gas containing least one corrosive or acidic gaseous component selected from the group consisting of hydrogen halide, chlorine, boron trihalide, thionyl chloride, and tungsten hexafluoride, which comprises contacting the exhaust gas with the metallic macromer scavenger compositions.