The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 1998
Filed:
Aug. 09, 1996
Haruhiko Kusunose, Yokohama, JP;
Naoki Awamura, Yokohama, JP;
Lasertec Corporation, Yokohama, JP;
Abstract
An interferometer of Mach-Zehnder type includes a first half mirror dividing an entrance light flux into first and second light fluxes, a first reflection mirror reflecting the first light flux toward a second half mirror, and a second reflection mirror reflecting the second light flux toward the second half mirror. At the second half mirror, the first and second light fluxes are mixed to derive an exit light flux including interference fringes. The first half mirror and first reflection mirror are secured to opposing side walls of a first hollow supporting block made of ceramics, and the second half mirror and second reflection mirror are secured to a second hollow supporting blocks made of ceramics. The first and second supporting blocks are coupled with each other at their side walls and an assembly of the supporting blocks is mounted on a surface of an optical bench by means of kinetic mounts. The half mirrors and reflection mirrors can be provided easily and precisely, and shrinkage and expansion of the optical bench due to a temperature variation do not produce any stress of the optical elements.