The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 1998
Filed:
Jun. 28, 1996
Applicant:
Inventors:
Tadahiro Ohmi, Sendai, JP;
Keiji Hirao, Osaka, JP;
Michio Yamaji, Osaka, JP;
Shigeru Itoi, Osaka, JP;
Tsutomu Shinohara, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Hiroshi Morokoshi, Osaka, JP;
Tetsuya Kojima, Osaka, JP;
Assignee:
Fujikin Incorporated, Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
F16K / ;
U.S. Cl.
CPC ...
137269 ; 137271 ; 137884 ;
Abstract
A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.