The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 1998

Filed:

Mar. 21, 1997
Applicant:
Inventors:

Takeshi Tomita, Tokyo, JP;

Shoji Kato, Tokyo, JP;

Atsushi Kimura, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2503 / ;
Abstract

There is disclosed an apparatus for generating an electron beam in an electron microscope comprising an electron gun, a second anode located under the gun, an aperture plate having an aperture for limiting the electron beam, and a scattered electron-blocking member for limiting passage of the beam. The aperture plate is mounted in the beam passage formed in the second anode. The scattered electron-blocking member is located under the aperture plate. Electrons scattered at the edges of the aperture are blocked by the scattered electron-blocking member from colliding against the accelerator tube.


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