The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 1998
Filed:
Aug. 23, 1996
Applicant:
Inventor:
Nobuaki Ogushi, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B / ; G03B / ; G01B / ;
U.S. Cl.
CPC ...
355 53 ; 355 77 ; 356399 ; 356400 ; 356401 ;
Abstract
A discrimination apparatus and method usable in an exposure apparatus for transferring a pattern of an original onto a substrate includes a device and step for producing information related to the relative positional deviation between the original and the substrate, and a device and step for discriminating an error shot on the basis of the information. The condition for positioning discrimination is changed in accordance with a layer or shot.