The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 1998
Filed:
Mar. 28, 1996
Deepak Kumar Nayak, Santa Clara, CA (US);
Ming-Yin Hao, Sunnyvale, CA (US);
Rajat Rakkhit, Milpitas, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A method and circuit for detecting boron at an interface between a p-type polysilicon gate and silicon dioxide gate dielectric is provided. A V.sub.t fluence test using about -6.67 mA/cm.sup.2 is used to detect boron at the interface. A p-channel metal oxide semiconductor ('PMOS') device having a source, drain, substrate, gate and silicon dioxide layer are connected to ground and a current source in order to detect the boron. An about -6.67 mA/cm.sup.2 current is applied to the PMOS gate while the source, substrate and drain are grounded. Various changes in threshold voltages are observed over different stress times. The boron concentration at the polysilicon/gate dielectric interface has been detected by the shift in threshold voltage. The concentration of boron at the interface has been found to degrade oxide quality as evidenced by charge-to-breakdown ('Q.sub.BD ') test of the oxide.