The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 1998

Filed:

Aug. 08, 1996
Applicant:
Inventors:

Katsuji Iguchi, Yamatokoriyama, JP;

Kenichi Azuma, Tenri-chi, JP;

Akio Kawamura, Fukuyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
257336 ; 257344 ; 257389 ; 257401 ; 257406 ; 257408 ; 257506 ; 438 29 ; 438 42 ; 438228 ;
Abstract

An MOS transistor comprises a semiconductor substrate having a field region; a gate electrode formed on the semiconductor substrate through the intermediatry of a gate insulating film; and source/drain regions formed in the semiconductor substrate; wherein the field region including at least a lower insulating film and an upper insulating film made of a material permitting the upper insulating film to be selectively etched with respect to the lower insulating film; the gate electrode being configured such that the gate length of a top surface thereof is greater than the gate length of a bottom surface thereof facing a channel region positioned between the source/drain regions; the gate electrode having a sidewall spacer formed of a sidewall insulating layer made of the lower insulating film and a material permitting the sidewall insulating layer to be selectively etched with respect to the upper insulating film, the sidewall spacer contacting a side wall of the gate electrode for covering an outer periphery of the channel region; and the channel region being substantially leveled with the source/drain regions.


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