The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 1998
Filed:
Dec. 02, 1996
Michael J Doyle, Villa Park, CA (US);
Nelson Urdaneta, Mission Viejo, CA (US);
Kim N Vu, Yorba Linda, CA (US);
Unit Instruments, Inc., Yorba Linda, CA (US);
Abstract
A mass flow controller and purifier has a canister arranged at right angles to a flow path through the mass flow controller. The canister holds a contaminant scavenging material which a gas stream contacts as it flows to remove a contaminant such as water. A purified process gas stream is fed through a bypass of a mass flow meter. A portion of the gas is supplied to a mass flow sensor which generates a signal indicative of a rate of mass flow. The mass flow signal is amplified and the amplified mass flow signal is linearized in a linearizer. The linearized mass flow signal is fed to a comparator which compares the linearized mass flow signal with an error signal and provides an output signal indicative of a mass rate of flow through the mass flow meter. A valve is connected to the mass flow meter and is controlled by the mass flow meter signal to meter the gas.