The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 1998
Filed:
Jul. 26, 1996
Andy Jeng, Tainan Hsien, TW;
Abstract
A structural configuration for a ceramic ring for guiding a semiconductor wafer down to the lower electrode of a dry etcher having upper and lower electrodes. The ceramic ring includes a base ring, a wall ring rising perpendicular to one surface of the base ring, and more than ten projections located on the top edge surface of the wall ring. Each of the projections includes a first and a second triangular surface, each at one end of the prismatic body and rising from the top edge surface of the wall ring. An inner sloped surface rises from-the top edge surface of the wall ring and an outer sloped surface rises from the top edge surface of the wall ring. First and second oblique sloped surfaces rise from the top edge surface of the wall ring, connecting the first and second triangular surfaces to the inner sloped surface, respectively. A trapezoidal surface having four sides, one each joined to the inner and outer sloped surfaces and the first and second oblique sloped surfaces forms an apex surface of the projection.