The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 1998

Filed:

Jan. 15, 1997
Applicant:
Inventors:

Yoshihiko Suzuki, Funabashi, JP;

Takashi Kawahito, Fujsawa, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01D / ; G01D / ;
U.S. Cl.
CPC ...
73789 ; 73791 ;
Abstract

Methods and apparatus are disclosed for measuring stress and strain of microscopic specimens under a microscope. The measurements of strain can be performed simultaneously with measurement of the stress, thereby avoiding problems with creep. The apparatus and methods employ an electrically driven microgripper having at least one finger adapted to contact the specimen. The apparatus and methods also employ a device operable to measure the dimensional change (strain) experienced by the specimen upon application of a stress to the specimen using the finger(s) of the microgripper. From measurements of electrical energy supplied to the microgripper before and during application of the stress to the specimen, and of the stress-caused dimensional change of the specimen, stress-versus-strain information about the specimen can be calculated.


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