The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 1998
Filed:
Apr. 29, 1994
Applicant:
Inventors:
Michael Rice, Pleasanton, CA (US);
Eric Askarinam, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., , US;
Primary Examiner:
Int. Cl.
CPC ...
F16J / ;
U.S. Cl.
CPC ...
277180 ; 277181 ; 1187 / ;
Abstract
A vacuum seal assembly that can be used in a plasma etch reactor to seal the chamber interior from the outside environment consists of a protective collar that is injection molded or machined of a high strength, high temperature and corrosion resistant thermoplastic material, the collar has an elastomeric gasket installed therein and is used in combination with a second elastomeric gasket to achieve a fluid-tight seal between two rigid surfaces made of silicon and quartz, respectively.