The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 1998
Filed:
Apr. 24, 1996
Peter Domenicali, Montpelier, VT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
An apparatus for providing tilt-free, linear micromotion translation of an object (12), such as an optical element, relative to a fixed rigid frame member (2) includes a flexural suspension (7) connected to the object (12) for enabling motion of the object (12) along a predetermined translational axis (18). The flexural suspension (7) includes a plurality of flexural links (14, 15) connecting a plurality of points (9) on the fixed rigid frame member (2) to a plurality of points (10) on a moving rigid frame member (11) with the links (14, 15) and the points (9, 10) connected by the links (14, 15) lying in a pair of parallel planes with an arrangement of links (14, 15) and fixed (9) and moving (10) points being disposed in each of the parallel planes and with the translational axis (18) being normal to the pair of parallel planes. The arrangements of the fixed (9) and moving (10) points are, disposed in the parallel planes for minimizing any undesirable cross axis translational motions (16, 17, 18) of the object (12). The apparatus also includes a linear motion transducer (32) and a drive mechanism (31) coupling linear motion transducer (32) to the flexural suspension (7) for enabling the tilt-free, linear micromotion translation of the object (12).