The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 1998
Filed:
Apr. 12, 1996
Applicant:
Inventors:
Andrew W Kulawiec, Fairport, NY (US);
Paul F Michaloski, Rochester, NY (US);
Assignee:
Tropel Corporation, Fairport, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356354 ; 356359 ;
Abstract
Test surfaces are measured at grazing incidence with an interferometer using diffractive optics for manipulating reference and test beams. A leading diffractive optic separates the reference and test beams, and a following diffractive optic recombines the beams after the test beam is reflected from the test surface. Extraneous light, including light from other orders of diffraction, is isolated and blocked from combining with test and reference wavefronts.