The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 1998

Filed:

Apr. 19, 1996
Applicant:
Inventors:

Gary S Selwyn, Hopewell Junction, NY (US);

Manoj Dalvie, Katonahm, NY (US);

C Richard Guarnieri, Somers, NY (US);

James J McGill, Fiskill, NY (US);

Gary W Rubolff, Waccabuc, NY (US);

Maheswaran Surendra, Croton-On-Hudson, NY (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ; C23F / ;
U.S. Cl.
CPC ...
156345 ; 20429815 ; 20429806 ; 20429831 ; 20429832 ; 20429834 ; 1187 / ; 118728 ;
Abstract

A device for reducing plasma irregularities includes an electrode assembly capable of applying an electric potential to said plasma. The electrode assembly includes a portion for reducing the plasma irregularities. The portion which reduces the plasma irregularities includes alternately a buried portion which is capable of altering the potential within the buried element, or else a conditioned portion of the surface which controls reflectivity and/or emissivity of portions of a surface of the electrode assembly differently.


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