The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 1998
Filed:
Jan. 23, 1996
Applicant:
Inventor:
Manabu Matsuo, Chiba, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134153 ; 134902 ; 15302 ; 248362 ; 108 22 ;
Abstract
A substrate rotating device includes a turn table placed horizontally, a substrate supporting member provided on the turn table, for supporting a substrate with respect to a vertical direction and for regulating the position of the outside periphery of the substrate with respect to a horizontal direction, a driving mechanism causing rotation of the turn table, an opening formed in the turn table, and an evacuating mechanism rotatable as a unit with the turn table, for forcibly evacuating a space between the turn table and the substrate through the opening,