The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 1997
Filed:
Jun. 14, 1996
Applicant:
Inventor:
Thomas O Maginnis, Jr, Dracut, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
732025 ; 7320225 ;
Abstract
The disclosed flowmeter includes a sensor tube and a heater. The sensor tube defines an input end, an output end, and an interior channel extending from the input end to the output end and permits fluid to flow from the input end through the channel to the output end. The heater includes a first end and a second end, and the heater establishes a non-uniform heater density function between the first and second ends. The heater is disposed proximal to the sensor tube for heating the tube.