The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 1997
Filed:
Nov. 08, 1995
Applicant:
Inventors:
Mark A Simmons, San Jose, CA (US);
Wilbur C Krusell, San Jose, CA (US);
Assignee:
Ontrak Systems, Incorporated, San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B08B / ; B08B / ; B08B / ; A47L / ;
U.S. Cl.
CPC ...
134 18 ; 15 883 ; 15302 ; 134-13 ; 134 29 ; 134 32 ; 134 34 ; 134902 ;
Abstract
A process for brush cleaning used in semiconductor wafer scrubbing systems. A process for brush cleaning that eliminates and/or reduces the load-up of brushes with contaminants. This brush cleaning process changes the pH level of a brush to repel contaminants that are on the brush. This process extends the useful life of the brush without significantly decreasing the throughput of the scrubbing system.