The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 1997
Filed:
Sep. 24, 1996
Applicant:
Inventors:
Katsuya Takemura, Nakakubiki-gun, JP;
Junji Tsuchiya, Nakakubiki-gun, JP;
Osamu Watanabe, Nakakubiki-gun, JP;
Toshinobu Ishihara, Nakakubiki-gun, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C08J / ;
U.S. Cl.
CPC ...
522 62 ; 522 63 ; 522 65 ; 522 15 ; 522148 ; 522172 ; 528 21 ; 528 25 ; 528 34 ; 528 42 ; 528 43 ;
Abstract
The invention provides a novel polysiloxane compound, typically polyhydroxybenzylsilsesquioxane, having some hydroxyl groups replaced by acetal groups and optionally acid labile groups. The polysiloxane compound is useful as an alkali soluble polymer for positive resist material.