The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 1997
Filed:
Mar. 28, 1995
Gregg S LeFevre, Austin, TX (US);
Darrell A Harris, Austin, TX (US);
Advanced Micro Devices, Sunnyvale, CA (US);
Abstract
An apparatus and method for removing particles and reducing temperature within an equipment unit, such as a photolithography stepper unit. The equipment unit is located in a clean room environment. The clean room environment contains environmental gases and is defined by four walls, a floor, and a ceiling. At least one of the four walls is hollow forming an air chase. Outside air is circulated in the air chase. A hole in the wall containing the air chase allows communication between the clean room environment and the air chase. A skirt is connected to the equipment unit and the floor, and a shroud is connected to the skirt, the floor, and the hole. The skirt and the shroud substantially seal the equipment unit with the hole to allow environmental gases within the equipment unit to be drawn within the equipment unit to the air chase.