The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 1997
Filed:
Apr. 03, 1992
Applicant:
Inventors:
Kuo-Hua Lee, Lower Macungie Township, Lehigh County, PA (US);
Chih-Yuan Lu, Lower Macungie Township, Lehigh County, PA (US);
Janmye Sung, Lower Macungie Township, Lehigh County, PA (US);
Assignee:
Lucent Technologies Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 / ; 437 / ; 437 / ; 437 / ; 437 / ; 437 30 ; 437 44 ;
Abstract
A semiconductor integrated circuit structure and method of fabrication is disclosed. The structure includes a FET gate with adjacent double or triple layered gate spacers. The spacers permit precise tailoring of lightly doped drain junction profiles having deep and shallow junction portions. In addition, a self-aligned silicide may be formed solely over the deep junction portion thus producing a reliable low contact resistance connection to source and drain.