The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 1997
Filed:
May. 30, 1995
Applicant:
Inventors:
Peter S Kirlin, Bethel, CT (US);
Brian A Vaartstra, Bethel, CT (US);
Douglas Gordon, Salt Lake City, UT (US);
Timothy E Glassman, Danbury, CT (US);
Assignee:
Advanced Technology Materials, Danbury, CT (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
4272481 ; 4272551 ; 4272552 ; 4272553 ; 427314 ; 4271263 ;
Abstract
Niobium and tantalum compounds suitable for use as chemical vapor deposition source reagents, and a process for depositing niobium- or tantalum-containing coatings using the compounds. The compounds have formula