The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 1997
Filed:
Jul. 09, 1996
Applicant:
Inventors:
Trace L Boyd, San Jose, CA (US);
Martin F Yeoman, San Ramon, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K / ;
U.S. Cl.
CPC ...
251193 ; 137559 ; 34242 ;
Abstract
Disclosed is a method for implementing a gate drive valve assembly used to isolate interfacing chambers. The method includes: (a) providing a drive assembly having at least one surface for attaching to a chamber, the drive assembly being mounted to the chamber such that a shaft contained within the drive assembly translates from the drive assembly through the at least one surface and along a bore in the chamber; and (b) attaching a gate plate to an end of the shaft when the shaft is at least partly within the chamber after translating along the bore.