The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 1997
Filed:
Dec. 27, 1994
Nobuo Kawada, Gunma-ken, JP;
Shoji Kano, Gunma-ken, JP;
Koji Hagiwara, Gunma-ken, JP;
Nobuo Arai, Gunma-ken, JP;
Junichi Arami, Tokyo, JP;
Kenji Ishikawa, Kanagawa-ken, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Tokyo Electoron Limited, Tokyo, JP;
Abstract
A ceramic electrostatic chuck with a built-in heater having electrodes of an electroconductive ceramic bonded to a surface of a supporting substrate of an electrically conducting ceramic. A heat generating layer of an electroconductive ceramic is bonded to the other surface of the supporting substrate and a covering layer of an electrically insulating ceramic is provided thereon. Each of the supporting substrate, electrode for the electrostatic chuck and heat generating layer has a surface roughness Rmax of 5 .mu.m or larger.