The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 1997
Filed:
Mar. 31, 1995
Applicant:
Inventors:
Frank Huussen, Bilthoven, NL;
Gerard Berenpas, Zuidwolde, NL;
Albert Hasper, Meppel, NL;
Chris GM. De Ridder, Hoogland, NL;
Assignee:
ASM International N.V., Bilthoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F27D / ;
U.S. Cl.
CPC ...
432241 ; 432-5 ; 432-6 ; 432253 ; 219390 ;
Abstract
A vertical furnace for processing wavers positioned on a support structure. The furnace comprises an inner sleeve, heating means and an outer sleeve. To support the inner sleeve on the support structure a support sleeve is provided engaging with its top and lower part of the inner sleeve and resting with its lower end on the support structure.
Published as:
EP0735575A1; KR960034959A; TW293082B; JPH08327238A; US5662470A; EP0735575B1; ATE211583T1; DE69618265D1; DE69618265T2; JP4285789B2;