The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 1997
Filed:
Apr. 05, 1996
Noriyuki Kaneoka, Hitachinaka, JP;
Kaneo Kageyama, Hitachinaka, JP;
Atushi Mouri, Hitachinaka, JP;
Junji Takada, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A sample is scanned with a focused electron beam so that secondary particles characteristic of the sample are generated therefrom and the generated particles are detected by a detector so as to be converted into an electric signal. The electric signal is converted into digital image data, which are stored in a image memory. The stored image data are displayed on a display along with digital SEM operating picture data stored in a memory of a personal computer. An operating signal generated by an input device is conducted to not only the personal computer but also an input control unit, which converts the operating signal into a control signal. This control signal is used to change a parameter associated with the image data, i.e., for example, to control focusing of the electron beam.