The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 1997
Filed:
Jun. 28, 1994
William M Hooke, Chapel Hill, NC (US);
Brian R Stoner, Chapel Hill, NC (US);
Steven P Bozeman, Chapel Hill, NC (US);
Roy E Fauber, Chapel Hill, NC (US);
Tobin L Munsat, Princeton, NJ (US);
Sean Washburn, Chapel Hill, NC (US);
The University of North Carolina at Chapel Hill, Chapel Hill, NC (US);
Kobel Steel USA, Inc., Research Triangle Park, NC (US);
Abstract
A plasma system is disclosed comprising a vessel suitable for containing a plasma at a pressure of at least about 100 mtorr, a plasma gas in the vessel at a pressure of at least 100 mtorr, an antenna with a substantially planar face positioned adjacent a portion of the vessel for applying an electromagnetic field to the plasma gas to thereby generate and maintain a plasma, and means for applying an external magnetic field to the plasma gas other than the field generated by the antenna, and having a component in a direction substantially perpendicular to the planar face of the antenna.