The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 1997
Filed:
Jun. 26, 1996
Applicant:
Inventors:
Thomas Bayer, Sindelfingen, DE;
Johann Greschner, Pliezhausen, DE;
Martin Nonnenmacher, deceased, late of Schoenaich, DE;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ; H01J / ;
U.S. Cl.
CPC ...
73105 ; 250306 ; 250307 ;
Abstract
A sensor (100) is set forth with which a microscope based on atomic forces is constructed and which represents the forces in up to three components. The sensor (100) is designed such that different vibration modes (transversal and torsional) can be induced individually and each mode corresponds to one force direction.