The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 1997
Filed:
Nov. 23, 1994
Satoshi Saitoh, Tokyo, JP;
Akihiro Terada, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron FE Limited, Tokyo, JP;
Abstract
A probe apparatus for inspecting electrical characteristics of a microelectronic element formed on a substrate and having a plurality of pads including a probe card having a plurality of probe needles, an image pick-up device for picking up images of the pads and the probe needles, a registration device which previously stores pad position information indicating pad positions of at least specified of the pads and needle position information indicating needle positions of at least specified of the plurality of probe needles, the needle positions being obtained by an actual measurement based on the images picked up by the image pick-up device, and a control processor for executing a task for detecting imaginary needle marks formed on the pads by imaginarily bringing the specified probe needles and the pads corresponding thereto into contact with each other, by overlapping the first position information and the pad position information of the microelectronic element, a task for detecting positional deviation information indicating a positional deviation between the needle marks and the pads, and a task for correcting a positional deviation between the pads and the probe needles in accordance with the positional deviation information.