The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 1997
Filed:
Jun. 28, 1996
Shigeoki Mori, Ayase, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A device for examining the electrode pads of a semiconductor chip comprises a table for supporting a semiconductor wafer including chips each having two lines being substantially straight and consisting of a plurality of electrode pads, a probe card having two lines corresponding to the lines of the electrode pads, and consisting of a plurality of probes, first and second TV cameras for photographing the lines of the electrode pads and probes, and a control unit responsive to signals supplied from the cameras, for calculating first imaginary lines corresponding to the lines of the electrode pads and second imaginary lines corresponding to the lines of the probes, and for recognizing deviation between the first and second imaginary lines. The table is moved by the deviation so as to align the lines of the pads with those of the probes.