The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 1997
Filed:
Jun. 27, 1994
Applicant:
Inventor:
Peter Schulz, Wappingers Falls, NY (US);
Assignee:
Siemens Components, Inc., Iselim, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C / ;
U.S. Cl.
CPC ...
134-2 ; 134-3 ; 134 26 ; 25218628 ;
Abstract
A complex building agent, such as EDTA is added in a predetermined concentration to the 'SC 1' step of a 'PIRANHA-RCA' cleaning sequence for reducing the metal contamination left on the surface of a silicon wafer after completion of this cleaning step.