The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 1997
Filed:
Jul. 05, 1995
Munehisa Yanagisawa, Gunma-ken, JP;
Shin-Etsu Handotai Co., Tokyo, JP;
Abstract
An apparatus of measuring a surface shape, which enables the surface shape of a sample to be accurately and quantitatively measured by a simple procedure, is provided. A sample 1 is placed on a sample stage 3, a light is projected by an optical system 8 on the sample 1, the sample stage 3 is tilted at intervals of a unit angle and on the basis of a prescribed surface by a motor 6, a reflected light from the sample 1 is received by a CCD 16, and an operational analysis circuit 21, in response to a command from a CPU 17 and based on the data of light reception obtained by the CCD 16 at intervals of a unit tilting angle, performs an operational analysis on the surface shape of the sample.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile