The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 1997
Filed:
Apr. 20, 1995
Applicant:
Inventors:
Tomoshi Taniyama, Tokyo, JP;
Hideki Kaihotsu, Tokyo, JP;
Yoshikatsu Kanamori, Tokyo, JP;
Kazuhito Ikeda, Tokyo, JP;
Shuji Yonemitsu, Tokyo, JP;
Assignee:
Kokusai Electric Co., Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118724 ; 118715 ; 118733 ; 432241 ; 432242 ;
Abstract
A thermal treatment furnace for use with a semiconductor system is provided. The thermal treatment furnace includes a scavenger which sealingly encloses a lower end of a reaction tube so as to diminish gas leakage from the reaction tube.