The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 1997
Filed:
Jun. 02, 1995
Applicant:
Inventors:
M Dalil Rahman, Warwick, RI (US);
Dana L Durham, East Greenwich, RI (US);
Assignee:
Hoechst Celanese Corporation, Somerville, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ; G03F / ; C02F / ;
U.S. Cl.
CPC ...
430311 ; 430331 ; 430338 ; 524466 ; 524463 ; 524556 ; 528482 ; 528487 ; 528470 ; 521 26 ;
Abstract
The present invention provides methods for producing top anti-reflective coating compositions having a very low level of metal ions, utilizing specially treated ion exchange resins. A method is also provided for producing semiconductor devices using such top anti-reflective coating compositions.
Rahman, M. (1997). Metal ion reduction in top anti-reflective coatings for photoresisis (U.S. Patent No. 5624789). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5624789
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile