The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 1997
Filed:
Nov. 15, 1995
Applicant:
Inventors:
David A Reed, Belmont, CA (US);
Paul W Palmberg, Edina, MN (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250287 ; 250286 ; 250309 ;
Abstract
A Time of Flight Mass Spectrometer which features rastering the secondary beam on the surface and analyzing composition at each of the rastered locations thereby greatly increasing the rate of data throughput. The primary beam is rastered on the target surface and the secondary beam is rastered on the detector surface. The latter arrangement provides ways of interpreting data including mapping the distribution of selected species on the target surface. The secondary beam is generated from a gas. This latter arrangement is especially useful for studying reaction rams of mixtures of reactive gases.