The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 01, 1997

Filed:

Dec. 30, 1994
Applicant:
Inventors:

Masahiko Nishiuma, Ohme, JP;

Norio Nakazato, Chiba, JP;

Hiroyuki Takahashi, Tachikawa, JP;

Chiyoshi Kamada, Kokubunji, JP;

Motoo Suwa, Koganei, JP;

Assignees:

Hitachi, Ltd., Chiyoda-Ku, JP;

Hitachi VLSI Engineering Corp., Kodaira, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438125 ; 22818022 ; 29840 ; 438126 ;
Abstract

A semiconductor device is fabricated by forming first metal balls on electrode pads of a semiconductor chip. The first metal balls each can have a sharp tipped anchor. All of the anchors simultaneously flattened slightly only to the extent of equalizing the height thereof. The first metal balls are bonded to electrodes formed on a substrate with wirings by embedding the anchors into the electrodes. Alternatively, second metal balls can be formed on the electrodes which are then flattened to equalize the height thereof. The first metal balls, either with or without the anchors, are bonded to the second metal balls. The first and second metal balls are preferably heated during the bonding step to soften the second metal balls.


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