The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 1997

Filed:

Aug. 16, 1995
Applicant:
Inventors:

Lawrence W Kessler, Buffalo Grove, IL (US);

Daniel M Erickson, Schiller Park, IL (US);

Daniel W Micek, Norridge, IL (US);

John Billone, DesPlaines, IL (US);

Assignee:

Sonoscan, Inc., Bensenville, IL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
73620 ;
Abstract

A controlled-immersion inspection mechanism gradually immerses a planar pattern of integrated circuits or other articles into a tank filled with water to a given level; across the tank there are two spaced parallel guide tracks along which two carriages, connected by a platform, move from an entry position above the water to an inspection position. In the inspection position the platform supports the articles, in an orderly array, for scanning inspection by a focussed energy beam, preferably an ultrasonic beam. A platform drive drives the platform between its entry and inspection positions. A mesh or other removable cover that permits water to flow but stabilizes article positions may cover the articles during immersion; the mesh is usually removed before scanning.


Find Patent Forward Citations

Loading…