The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 1996
Filed:
Feb. 09, 1996
Jun Zhao, Cupertino, CA (US);
Frank P Chang, San Jose, CA (US);
Charles N Dornfest, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A shielded substrate support (2) for deposition chambers (6) includes a heated base (8) having a substrate support surface (16) and a sidewall (18). A corrosion-resistant base shield (10) has cover plate (14, 22) and skirt (24) portions and is used to cover and protect the support surface and a part of the sidewall during cleaning operations. The base and the base shield have first and second CTEs, the second CTE being smaller than the first CTE. The base and base shield include complementary locking surfaces sized and positioned so that only when at a higher temperature will the locking surfaces be opposite one another to prevent removal of the base shield from the base. This eliminates the need for mechanical locking elements, such as threads, pins or twist locks, which increase the cost and can be a source of particle contamination.