The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 1996
Filed:
Oct. 13, 1995
Peter Y Lin, Miau-Li, TW;
United Microelectronics Corp., Taiwan, TW;
Abstract
The present invention relates to an improved equipment in semiconductor processing. The invention includes a horizontal quartz tube surrounded with heating element for processing wafers, an inlet pipe of a gas injector mounted at the center of the closed end of a horizontal quartz tube, four sheath supports each being 90 degrees apart located at the closed end of a horizontal quartz tube for supporting a thermocouple sheath. The horizontal quartz tube is rotated 90 degrees every 14 to 15 days in a predetermined direction. As the horizontal quartz tube is rotated, the thermocouple sheath is always inserted into the sheath support located at the bottom of the horizontal quartz tube.